周五, 11/01/2024 - 14:24 IET-relation Journal of Vacuum Science & Technology 0022-5355 V.1(1964)-V.21(1982) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 0734-2101 V.1(1983)-V.20(2002) Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 0734-211X V.1(1983)-V.8(1990) Journal of Vacuum Science & Technology A: An international Journal Devoted to Vacuum, Surfaces, and Films 1553-1813 V.21(2003)- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement and Phenomena 1071-1023 V.9(1991)-V.28(2010) Journal of Vacuum Science and Technology B: Nanotechnology & Microelectronics: Materials, Processing, Measurement, and Phenomena 2166-2746 V.28(2010)-
