• title: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement and Phenomena
    issn: 1071-1023
    eissn:
    publisher: New York$$the American Institute of Physics
登录号 年 卷 期
J076341 2010 28 6
J076340 2010 28 3-5
J076339 2010 28 1-2
J075329 2009 27 6
J075328 2009 27 4-5
J075327 2009 27 3
J075326 2009 27 2
J075325 2009 27 1
J074405 2008 26 1-2
J074406 2008 26 3-5
J074407 2008 26 6
J073866 2007 25 6
J073865 2007 25 3-5
J073864 2007 25 1-2
J072560 2006 24 5-6
J072559 2006 24 3-4
J072558 2006 24 1-2
J072137 2005 23 5-6
J072136 2005 23 3-4
J072135 2005 23 1-2
J070893 2004 22 6
J070890 2004 22 1-2
J070891 2004 22 3
J070892 2004 22 4-5
J069758 2003 21 6
J069757 2003 21 4-5
J069756 2003 21 2-3
J069755 2003 21 1
J069752 2002 20 5
J068758 2002 20 1-2
J068759 2002 20 3-4
J069753 2002 20 6 Pt.1
J069754 2002 20 6 Pt.2
J068275 2001 19 5
J068196 2001 19 6
J068076 2001 19 4
J068075 2001 19 3
J067669 2001 19 1-2
J065265 2000 18 3
J065763 2000 18 6
J066121 2000 18 4
J066122 2000 18 5
J065264 2000 18 2
J065263 2000 18 1
J064181 1999 17 6
J064002 1999 17 5
J063032 1999 17 4
J063031 1999 17 3
J063030 1999 17 2
J063029 1999 17 1
J060615 1998 16 2
J060464 1998 16 5
J060557 1998 16 3
J060614 1998 16 1
J060616 1998 16 4
J061439 1998 16 6
J060467 1997 15 6
J060466 1997 15 4
J060245 1997 15 5
J059022 1997 15 1-3
J058286 1996 14 3
J057273 1996 14 1
J057274 1996 14 2
J058287 1996 14 4
J058288 1996 14 5-6 Pt.1
J058289 1996 14 6
J056517 1995 13 5-6
J056072 1995 13 4
J056071 1995 13 3
J054630 1995 13 1-2
J053229 1994 12 3
J053227 1994 12 1
J053228 1994 12 2
J053230 1994 12 4
J054629 1994 12 5-6
J051641 1993 11 4-5
J051640 1993 11 6
J050859 1993 11 3
J050858 1993 11 1-2
J050857 1992 10 4 Pt.2-5
J050856 1992 10 3-4 Pt.1
J050855 1992 10 6
J049425 1992 10 1-2
J049423 1991 9 4-5
J049424 1991 9 6
J048560 1990 9 1-3